Advanced Plasma Technology by Riccardo d'Agostino, Pietro Favia, Yoshinobu Kawai, Hideo

By Riccardo d'Agostino, Pietro Favia, Yoshinobu Kawai, Hideo Ikegami, Noriyoshi Sato, Farzaneh Arefi-Khonsari

A panel of the world over popular scientists speak about the newest ends up in plasma expertise. This quantity has been compiled with either a didactic procedure and an summary of the latest achievements for business functions. it truly is divided into major sections. One is concentrated on basic expertise, together with plasma construction and keep an eye on, high-pressure discharges, modeling and simulation, diagnostics, airborne dirt and dust keep watch over, and etching. The part on software know-how covers polymer remedies, silicon sunlight mobile, coating and spray, biomaterials, sterilization and waste therapy, plasma propulsion, plasma exhibit panels, and anti-corrosion coatings. the result's an quintessential paintings for physicists, chemists and engineers eager about the sphere of plasma expertise.

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However, in order to avoid standing wave effects that result in a non-constant current Fig. 9 Electromagnetic simulation showing the concentrating effect of the magnetic core (arbitrary units). 3 Sources and Reactor Configuration Fig. 10 Ion current density profile measured on a large area plasma source. 5 mtorr, P ¼ 2000 W. 56 MHz. The choice of this frequency is not fortuitous. It is the frequency for which the magnetic material used in this source presents the highest magnetic permeability value.

Despite the steady progress in the field during the last decades, plasmas are yet not fully understood and simulations offer unique capabilities for studying plasma physics and improving 36 3 Advanced Simulations for Industrial Plasma Applications the performance of low-temperature plasma sources. Physical parameters which are difficult to measure in experiments can be obtained in simulations. Due to computational limitations, however, plasma models require approximations. In spite of these approximations, simulations have advanced our fundamental understanding of plasma physics, plasma processes, and plasma equipment.

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